基板上に塗装された半透明のソルダレジストなど、計測対象物が複数の層から成る場合があります。断層モードを用いることで、レジスタ面と奥の金属面等複数の面の高さを同時に計測することが可能です。
各面の距離が正確に計測できるので塗布された樹脂素材の体積を計測するといったことも可能です。
複数の層が重なり合った状態が確認できます。
CASE適用事例
基板のソルダレジスト
2015.11.12
半導体/IC
heliotis
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