| 型式 | データポイント/ プロファイル | 視野幅(FOV) (mm) | クリアランス距離(CD) (mm) | 測定レンジ(MR) (mm) | 解像度X (mm) | 繰返し 精度Z (um) | リニアリティZ (MRの+/-%) |
|---|---|---|---|---|---|---|---|
| Gocator2880 | 1280 | 390 - 1260 | 350 | 800 | 0.375 - 1.10 | - | 0.04 |
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